THE NEW TYPE III SUPERCHAMBER
NEW! Greater than 5 Billion system lifetime. The new The EX5 TYPE III SUPERCHAMBER
gives very long system lifetime, improved static and dynamic gas lifetime, ultra
low vibration and nanosecond jitter. The TYPE III SUPERCHAMBER uses total metal/ceramic
technology, together with the latest advances in materials science to deliver
the maximum performance available from a 2 liter volume mini erxcimer laser.
 | New 1000Hz version |
| New chamber Material |
| State of the art, newly available materials |
| Up to 100% increase in gas lifetime compared to a standard chamber |
| Linear power output with repetition rate |
| Higher average power |
| 1% pulse to pulse stability |
| >10,000 hours bearing lifetime |
| 2 billion pulse chamber lifetime |
| No optics service for 2 billion pulses at 248nm |
| > 5 billion pulses |
| Improved electrode design |
| Ultra high repetition rates |
| Improved 157nm performance |
| No reversal current main discharge for longer electrode life |
| Active gas clean up |
| Reduced parts count gas handling system |
| The most advanced excimer laser chamber ever |
| CE mark |
