SUPERCHAMBER II

THE NEW TYPE II SUPERCHAMBER

NEW! The use of newly available technology and advanced materials have resulted in a breakthrough in excimer laser performance. The EX5 TYPE II SUPERCHAMBER gives over 50% improved static and dynamic gas lifetime with all gases over the standard laser chamber. The TYPE II SUPERCHAMBER uses total metal/ceramic technology, together with the latest advances in materials science to deliver the maximum performance available from a 2 liter volume mini erxcimer laser.

	New chamber Material
	State of the art, newly available materials
	Up to 100% increase in gas lifetime compared to a standard chamber
	Linear power output with repetition rate
	Higher average power
	1% pulse to pulse stability
	>10,000 hours bearing lifetime
	2 billion pulse chamber lifetime
	No optics service for 2 billion pulses at 248nm
	> 1 billion pulses (EX10) 500 million (EX5) without optics cleaning or exchange at 193nm and 157nm
	Improved electrode design
	Ultra high repetition rates
	Improved 157nm performance
	No reversal current main discharge for longer electrode life
	Active gas clean up
	Reduced parts count gas handling system
	The most advanced excimer laser chamber ever
	CE mark