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The new EX350 high energy
laser EX350 |
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Application Notes:
Why Choose GAM EX200 for PLD ? |
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The new
EX200 high energy excimer laser, producing up to 200mJ output energy.
Please visit the EX200 page for more details. |
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GAM Laser,
now has a new 5000sq.ft clean room of class 1000 standards for chamber
manufacturing. |
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Jan 2006 -
Meet GAM Laser at Photonics West, San Jose. |
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New USB Control - All GAM Laser
products are now available with optional USB control. Click here for more information. |
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August 2005 - Meet GAM Laser at
American Chemical Society conference, Washington. |
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June 2005 - Meet GAM Laser in Laser
2005 conference, Munich. |
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Immersion lithography
demonstrates
38nm resolution with GAM Laser Line Narrowed 193nm source |
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NEW EX5
TYP II SUPERCHAMBER The most advanced excimer chamber ever, up to 100% increase in gas lifetime |
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Line narrowing packages. 10mJ and
35pm linewidth at 248.4nm. |
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GAM Laser introduces the EX5/500 a NEW 500Hz
version of the EX5 low cost mini excimer laser with improved
specifications. |
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March 2003,
EX5 laser
performance improvements, repetition rate increased to 250Hz |
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February 2003 Pulse to pulse stability
improved to < 1% on all models |
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March 2002 > I Billion pulses hands
free operation without window service at 248nm and 193nm from the model
EX10 and EX50 Industrial laser versions. |
