|
EX5 EXCIMER LASER
2.5W of deep UV (193nm) in 1.2 cubic feet
The low cost mini Excimer
NOW WITH NEXT GEN SUPERCHAMBER
Total system lifetime > 5 Billon pulses
 
Applications
 | Ionization source |
| Compact OEM systems |
| Micromachining |
| Refractive Surgery |
A genuine full function, low cost MINI excimer laser in an ultra compact 48 X 26 X 26cm,
15kg, air cooled package with up to 8.0W at 248nm and 4.0W at 193nm and up to
500Hz repetition rate. The laser design features
include an internal Faraday cage for ultra low electrical noise and a total
metal/ceramic laser chamber.
NEW TYPE II SUPERCHAMBER
The EX5 is now available in 250Hz, 500Hz
and 1000Hz versions. The TYPE III SUPERCHAMBER produces higher average power output with
longer gas lifetime.
F2 operation in the VUV is also standard with up to 1W output power. A new
broadband optics set allows operation from 157nm to 351nm with full
specifications simply by changing the gas. A 500Hz Industrial version is also
available.
Key Benefits
| Long sytem lifetime for Industrial installations |
| The most powerful mini excimer available anywhere |
| Mini excimer in a single package |
| Internal vacuum pump and halogen filter |
| Computer controlled |
| Ultra Low trigger jitter |
| High reliability state of the art, long life laser chamber |
| Excellent pulse to pulse stability |
| Very long shelf life |
| 250Hz, 500Hz and a NEW 1000Hz version |
| The latest in materials science TYPE III SUPERCHAMBER |
| High duty cycle Industrial version |
| 25mJ TEM00 C02 TEA
Version |
EX5 Specifications
|
PARAMETER |
F2 |
ArF |
KrF |
XeCl |
XeF |
| Wavelength nm |
157 |
193 |
248 |
308 |
351 |
|
Energy Max. mJ |
1.5/3* |
12 |
20 |
8 |
6 |
| Peak Power MW |
0.25 |
1.75 |
2.5 |
1.0 |
0.75 |
| Average Power
@ 250Hz |
0.3/0.4 |
2.5 |
4.0 |
1.4 |
1.3 |
| Average Power @ 500Hz |
0.5/1.0 |
5.0 |
8.0 |
2.5 |
2.4 |
|
Average Power 1000HZ |
1.5 |
10 |
15 |
5.0 |
4 |
| Dynamic gas lifetime Pulses to
50% energy |
10E6 |
12E6 |
18E6 |
20E6 |
15E6 |
|
Shelf life to 50% energy |
10 days |
20 days |
30 days |
>2 Months |
30 Days |
| Pulse Length nS |
8 |
|
Stability |
<2% Standard Deviation |
| Tube Service |
>5
Billion Pulses |
|
Beam Size, mm |
3X 6 |
| Divergence, mRad full angle |
1 X 2 |
|
Cooling |
Air standard/Optinal Water |
| Timing Jitter |
2nS Standard
Deviation |
| Weight |
15kg 250/500Hz, 25kg 1000Hz |
*3mJ for F2 optimized version.
Download EX5 Data
sheet in .pdf format
EX5 Powerpoint Presentation
EX5
Dimensional drawing
EX5 Beam Profile
| 
