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EX10IN INDUSTRIAL LASER
SPECIFICATIONS
|
PARAMETER |
ArF |
KrF |
XeCl |
XeF |
|
Wavelength nm |
193 |
248 |
308 |
351 |
|
Energy Max. mJ |
20 |
30 |
12 |
12 |
|
Energy Control Range, mJ |
5-20 |
10-30 |
7-12 |
7-12 |
|
Average power EX10IN/300 |
4.0 |
6.0 |
3.0 |
3.0 |
|
Average power EX10IN/600 |
7.0 |
12.0 |
6.0 |
6.0 |
|
Average Power EX10IN/750 |
9.0 |
18.0 |
8.0 |
8.0 |
|
Repetition Rate Hz |
300/600/750
|
Dynamic gas lifetime |
20E6 |
35E6 |
20E6 |
20E6 |
|
Static Gas Life to 50% energy |
60 days |
90 days |
6 months |
90 days |
|
Pulse Length,ns |
15 |
|
Beam Size, mm |
8 X 3-4 |
|
Divergence, mRad full angle |
2 x 1 |
| Stability |
<2%
Standard deviation |
|
Cooling |
Air |
|
Optics Service |
300-500 Million |
1 Billion |
100E6 |
500E6 |
|
Tube Service |
> 3 Billion Pulses |
EX10IN Dimensions
|
