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EX10IN INDUSTRIAL LASER

SPECIFICATIONS                 

PARAMETER

ArF

KrF

XeCl

XeF

Wavelength nm

193

248

308

351

Energy Max. mJ

20

30

12

12

Energy Control Range, mJ

5-20

10-30

7-12

7-12

Average power EX10IN/300

4.0

6.0

3.0

3.0

Average power EX10IN/600

7.0

12.0

6.0

6.0

Average Power EX10IN/750

9.0

18.0

8.0

8.0

Repetition Rate Hz

          300/600/750

Dynamic gas lifetime

20E6

35E6

20E6

20E6

Static Gas Life to 50% energy

60 days

90 days

6 months

90 days

Pulse Length,ns

15

Beam Size, mm

 8 X 3-4

Divergence, mRad full angle

2 x 1

Stability <2% Standard deviation

Cooling

Air

Optics Service 300-500 Million 1 Billion 100E6 500E6
Tube Service                 > 3 Billion Pulses

EX10IN Dimensions