EX350 Laser System

THE NEW EX350 EXCIMER LASER

The EX350 is a high energy excimer laser producing up to 250mJ output energy at 248nm and 150mJ at 193nm. The laser is designed for applications requiring high pulse energy such as Pulsed Laser Deposition.

Download EX350 Data sheet .pdf format

Download Dimensional drawing

PARAMETER	F2	ArF	KrF	XeCl	XeF
Wavelength nm	157	193	248	308	351
Energy Max. mJ	20	150	250	150	100
Average Power @20Hz	0.4	3	5	3	2
Average Power @50Hz	0.9	7	12	7	4.5
Average Power @ 100Hz	1.8	14	22	14	9
Shelf life Approx. to 50% energy	15 days	60 days	90 days	6 months	90 Days
Pulse Length	20-26 nS
Beam Size	19 X 7 mm
Divergence	1.0 X 2.8 mRad
Stability	<2% Standard Deviation
Timing Jitter	+/- 2nS
Cooling	Air/ Water

Key Benefits

	High Energy in a single table top package
	Low divergence beam
	Computer controlled scientific instrument
	Low Jitter <2nS standard deviation