EX10, EX10A/AR EXCIMER LASERS
For applications requiring high repetition rate and moderate average power, when you need a compact air cooled laser, the EX10 is the choice. The EX10 excimer laser offers state of the art performance in a compact package and provides a highly reliable, powerful source of ultraviolet radiation. Repetition rates of 250Hz and 500Hz in air cooled units, an average power of 12W with KrF at 248nm and 6.5W with ArF at 193nm give of operation between refills using XeCl. Ideal for applications in micromachining, tunable laser pumping, marking and mass spectrometry.
Turn Key Table Top System
The EX10 laser is total metal/ceramic device and uses an advanced linear design to produce high energy output in a compact package. The carefully chosen materials for laser construction give the EX10 static and dynamic gas lifetimes unmatched by any other excimer laser. The gas lifetime advantage is particularly noticeable with F2 at 157nm in the VUV where static gas lifetime is over 15 days compared to 1 day for most excimer lasers. A optimized F2 version the EX10F is recommended for dedicated 157nm operation.
The EX10 is designed for medical, scientific and industrial applications where long term service free operation is required. Software automatically maintains constant , highly stable (<2%), energy output using the standard internal energy monitor. The software also warns the user if maintenance is required. The laser can operate directly from a PC for remote programming and software upgrading. The EX10 of course includes standard features such as active thermal stabilization, constant power and energy control, external triggered operation, sync out, automatic refill and automatic gas control. The laser can be completely controlled from a Windows 9x or Windows NT software package
High Efficiency Discharge
High efficiency is the key to outstanding laser performance. The EX10 operates with up to 3 times the efficiency of similar mini excimer lasers. This means that only 1/3 of the energy input is required to achieve the same optical output. The optimized soft corona preionization state creates a uniform high efficiency discharge at repetition rates up to 1000Hz with a switching jitter of less than 2nS standard deviation. Additionally the increased efficiency greatly decreases the wasted energy deposited to the discharge and results in reduced EMI and much reduced electrode and component wear. This also increases total system lifetime and allows air cooled operation at the highest repetition rates.
The laser features active thermal stabilization. This allows long term operation of the laser with excellent pointing stability, better than 20 micro radians/C.
EX10A high power mini excimer laser
Pulse to Pulse stability. Click graph for larger view