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BraggMaster Line Narrowed Lasers
The BraggMaster series of lasers
offers line narrowed single wavelength excimer lasers in affordable high
reliability systems. The EX5BM, EX10BM and EX50BM are ideal sources for
applications requiring line narrowed 193nm and 248nm lasers for spectroscopy,
inspection and lithography. BraggMaster lasers offer simultaneously, high
temporal and high spatial coherence for FBG and lithography applications
EX5BM
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PARAMETER |
ArF |
KrF |
| Wavelength, nm |
193 |
248 |
|
Energy Max., mJ |
5 |
10 |
| Linewidth, pm |
40 |
35 |
| Spectral
Line shape |
Gaussian |
| Tunability |
+/-200pm |
+/-200pm |
| Average Power
@ 250Hz W |
0.25 |
2.0 |
| Average Power @ 500Hz W |
0.45 |
3.5 |
| Repetition
Rate Max. Hz |
250/500 |
| Dynamic gas lifetime
Pulses to 50% energy* |
5E6 |
10E6 |
|
Shelf life to 50% energy |
3
days |
10 days |
| Pulse Length nS |
8
|
10 |
|
Stability |
<2% Standard Deviation |
| Tube Service |
2
Billion Pulses |
|
Beam Size, mm |
3X 6 |
| Divergence, mRad full angle |
1 X 2 |
|
Cooling |
AIR |
| Timing Jitter |
2nS Standard
Deviation |
| Weight |
16kg |
EX10BM
|
PARAMETER |
ArF |
KrF |
| Wavelength, nm |
193 |
248 |
|
Energy Max, mJ |
10 |
20 |
| Linewidth, pm |
40 |
35 |
| Spectral
Line shape |
Gaussian |
| Tunability |
+/-200pm |
+/-200pm |
| Average Power
@ 300Hz ,W |
1.5 |
3.0 |
| Average Power @ 600Hz, W |
2.5 |
5.0 |
| Repetition
Rate Max, Hz |
300/600 |
| Dynamic gas lifetime
Pulses to 50% energy* |
15E6 |
30E6 |
|
Shelf life to 50% energy |
30 days |
60 days |
| Pulse Length nS |
10
|
12 |
|
Stability |
<2% Standard Deviation |
| Tube Service |
2
Billion Pulses |
|
Beam Size, mm |
3X 8 |
| Divergence, mRad full angle |
1 X 2 |
|
Cooling |
AIR |
| Timing Jitter |
2nS Standard
Deviation |
| Weight |
40kg |
Download brochure in .pdf format
Note: A <10pm linewidth Version of the ArF 193nm and KrF 248nm BraggMaster is also available
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